VIBRATION ISOLATION MOUNT
RSi Series
Main Features
- It can be easily installed and used at the bottom of heavy equipment
- A vibration isolation control device suitable for X-Y stage transfer of high precision measurement/inspection equipment
- High precision repeatability and excellent leveling are possible even at high-speed transfer of the X-Y stage
- High performance vibration isolation function in vertical/horizontal direction
Main Specification※ Custom Orders Available
Model |
RSi Series |
Natural Frequency |
Vertical: 1.0~1.5Hz/ Oil Damper: 2.0~2.3Hz Horizontal: 1.5~1.8Hz/ Oil Damper: 2.0~2.5Hz |
Leveling type |
Auto Leveling System by 3-Point Leveling Valve Repeatability : ±0.05mm / ±0.1mm |
Damping method |
Air Damping by Orifice |
Operation |
4 ~ 6kg/cm2 Compressed air or nitrogen gas |
Application
- Semiconductor/Large format display measurements/Inspection equipment
- High precision optical measurement/Laser equipment
- Other high precision measuring instruments
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