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Necessity of vibration control (vibration isolation), necessity of vibration isolation platform
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2023-08-08
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The basics of precision analysis, measurement, and manufacturing
Micro Vibration Control Solution
Why needs Vibration Control?
In general laboratories and industrial spaces, various equipment sensitive to micro-vibrations such as high magnification/high resolution image analysis equipment, laser－based research facilities, semiconductor manufacturing facilities, and biotechnology research facilities are installed. Laboratory and industrial spaces have various vibration
sources due to the external environment, and these vibration sources can cause blurry images when analyzing images, errors in precision measurement, decrease in production yield in semiconductor manufacturing, and wrong results of laser and biotechnology experiments. The environment in which various experimental equipment and production facilities are placed must provide a stable environment by maintaining a vibration level that is much lower than the human perception threshold.
Source of Vibration
The two main vibration sources are divided into external vibration sources(floor vibration sources) and internal vibration sources caused by the movement of the equipment itself. The external vibration source (floor vibration source) vibrates for different reasons as shown in the image below. Since each equipment and facility operates within a typical frequency range and all these vibrations are transmitted to the floor of the machine and are the main cause of deterioration of the overall machine performance of the machine and facility, floor quality is a major key factor in the final equipment/equipment performance. It's possible.
Vibration Con trol Solution
In order to have the required environment of equipment or facilities specified in the vibration criteria curves (VC Curves), it is to provide an optimized environment by minimizing the influence of vibration sources such as analysis/measurement/manufacturing facility equipment by utilizing micro-vibration control technology solutions such as optical tables, vibration isolation tables, and independent foundation vibration isolation tables.
Vibration Criteria Curves
Vibration criteria used in the industrial field utilizes a lot of “BBN Criteria” or “VC Curves". In particular, the curve below is used as a standard for precise experimentation, analysis, measurement and construction of a sensitive semiconductor facility environment (floor construction, piping, ventilation system). BBN Criteria and VC Curves are the same curve, but VC Curves is a more recently improved curve and provides a standard that can respond to micro- vibration control technology.
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